Parameters | Description | Values |
Length of the device | 40 mm | |
Width of the device | 30 mm | |
Length of primary beam k1 | 40 mm | |
Length of secondary beam k2 | 30 mm | |
Width of primary beam k1 | 30 mm | |
Width of secondary beam k2 | 2 mm | |
Thickness of primary beam k1 | 60 µm | |
Thickness of secondary beam k2 | 16 µm | |
Length of proof mass m1 | 3 mm | |
Length of proof mass m2 | 0.5 mm | |
Thickness of m1 | 500 µm | |
Thickness of m1 | 500 µm |